Spin Coater
The basic functions include dispensing, spin coating, baking, and cooling. The system allows for flexible Recipe settings to meet various requirements for multiple layers of coating, different spin speeds, and a wide range of temperature combinations.
Spin Coater
Sale price¥10,000.00
Product specification
Spin Speed
0-10,000 RPM
Temperature
RT (Room Temperature) - 200°C, ±1°C
Temperature Measurement
Infrared film temperature measurement
Dispensing Method
Manual, syringe pump, or peristaltic pump (optional)
Temperature Measurement
Infrared film temperature measurement
Parameter Setting
Touch screen setup or other methods
Process Flow
Manual wafer loading → Automatic dispensing → Automatic spin coating → Automatic heating → Automatic cooling → Manual wafer unloading
Vacuum Chuck
Various sizes available, suitable for different shapes of samples
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