The single crystal graphene wafer was produced by epitaxial growth on the single crystal copper substrate. We eliminate the wrinkles and step bundles of graphene via interface bonding force and thermal stress engineering, which decrease its roughness (RMS) to less than 1nm.

Compared with ordinary CVD graphene films, single crystal graphene wafers have higher flatness, better mechanical properties and ultra-high uniformity. Graphene is used in high-performance electronic and optoelectronic devices. Single-crystal Graphene wafers are ideal materials for the integration of high-performance electronic and optoelectronic devices.