MPCVD Furnace
MPCVD Furnace
Sale price¥100,000.00
Product specification
Power Supply
AC380V ±10% Three-phase five-wire system 50Hz, Rated input < 10KVA
Microwave Output Power
0.5~6kW continuously adjustable
Power Stability
Better than 2%
Waveform
≤1%
Microwave Frequency
2450MHz ± 50MHz
Temperature Measurement Method
Infrared 300~1400°C
Ultimate Vacuum
6X10^-6 torr
Cavity Internal Working Pressure
7 torr ~ 250 torr
Sample Stage Diameter
Ø60mm
Sample Stage Axial Movement Range
0-60mm
Working Atmosphere
Five gases (customizable by user)
Microwave Leakage
< 5mW/cm2
Working Environment
Temperature 15-40°C, Relative humidity < 60%, No corrosive gases
Cooling Water Flow Rate
> 22L/Min
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