High temperature microscope observation system (CVD Microscope)

In-situ microscopic observation of high-temperature processes (such as metal heat treatment, high-temperature epitaxial growth and etching of thin film materials, high-temperature phase transformation processes of materials, and high-temperature chemical reactions) is extremely important:

• Visualizing high-temperature processes effectively assists researchers in gaining a deeper understanding of mechanisms and in developing new materials, methods, and technologies.
• The development of high-temperature microscopic observation techniques will further be applied to industrial-scale continuous production, enabling online detection and real-time feedback. This provides strong evidence for setting and adjusting reaction parameters, significantly improving production efficiency.
• Emerging AI smart manufacturing technologies require a large amount of experimental data, which can be obtained through high-temperature optical microscopy observation systems and applied to large-scale industrial manufacturing systems.

Dendritic growth and reduction process of copper surface oxides from room temperature to 1000°C.

Grain evolution of nickel foil during heating to 1300°C and the subsequent cooling process.

This equipment has made technological breakthroughs and has the following advantages:

• Through unique optical path design, it overcomes the problem of light signal interference caused by thermal radiation during high-temperature processes.
• Traditional optical path BGI microscopic observation system.
• Through a unique insulation layer and water cooling design, it resolves the contradiction between the short working distance of high-magnification objective lenses and the high temperature, transparency, and insulation of the reactor.
• By adopting a cold wall heating method, it overcomes the challenge of the traditional hot wall system being limited to 1100°C. The working temperature can reach up to 1300°C, and it supports various atmospheric conditions.

In-situ observation of graphene growth at 1000°C, along with related optical contrast analysis