Direct Growth Equipment

300~1100°C, Maximum Temperature: 1200°C

1000mm

5 zones

Type S

±1°C

Maximum controllable temperature gradient ≥ 15°C/min

Capable of working continuously for ≤ 72 hours at 1100°C

Capable of working continuously for ≤ 720 hours at ≤ 600°C

≤1.50% F.S.

Leakage rate ≤ 1 × 10^-9 Pa·m³/s

Imported MFC

Imported EP grade fittings, welding type

Pre-diffusion chamber (for uniform gas distribution)

Filters with 0.5μm precision

Value

Equipped with nitrogen purge function

Overpressure detection for reaction chamber

Equipped with four vacuum pumps, automatic air inlet valve, throttle valve, ensuring vacuum stability and regulation

500Pa~1atm

Normal working cooling system, water temperature not exceeding 50°C

Equipped with air cooling system

≤ 1mm

Adjustable speed between 20-1000mm/min

20kg

Equipped with display instrument, control accuracy of 0.1%, providing accurate temperature control and measurement

Automatic air inlet, with door interlock. When the door is not closed properly, the operation stops automatically

Equipped with alarms for overpressure, air pressure, water cooling, and temperature alarms